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Epitaxially grown thin film crystalline aluminium nitride is used for surface acoustic wave sensors (SAWs) deposited on silicon wafers because of AlN's piezoelectric properties. One application is an RF filter which is widely used in mobile phones, which is called a thin film bulk acoustic resonator (FBAR).
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Contamination Control in Carbon Monoxide Processes
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Properties of aluminum nitride thin films for piezoelectric
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Nov 03, 2010· This invention relates to a chamfering method of nitride semiconductor wafers, and a nitride semiconductor wafer. Group 3 nitride semiconductors, e.g., gallium nitride (GaN), aluminum nitride (AlN) and so on, have wide bandgaps and promising applications to light emitting devices and electronic devices.
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Use of Acoustic Emission During Scratch Testing for
In this work, acoustic emission during scratch testing of the aluminum nitride coatings formed on stainless steel substrate by reactive magnetron sputtering was analyzed to assess the coating failure.
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X-ray characterization techniques for the assessment of
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